Laser micro-fabrication of concave, low-roughness features in silica
نویسندگان
چکیده
منابع مشابه
Fabrication of concave silicon micro-mirrors.
We have fabricated spherical and cylindrical concave micro-mirrors in silicon with dimensions from 20 microm to 100 microm. The fabrication process involves standard photolithography followed by large area ion beam irradiation and electrochemical anodisation in a HF electrolyte. After thermal oxidation the silicon surface roughness is less than 2 nm. We also present a multilayer porous silicon ...
متن کاملFemtosecond laser micro-fabrication for tailoring photonic crystals in resins and silica
We report laser micro-fabrication of photonic crystal structures in silica glass and photopolymerizing resins, and present a detailed analysis of their structural and optical properties. Photonic crystals with 2D triangular lattice and 3D diamond lattice in glass are found to exhibit moderately pronounced photonic pseudogaps. Formation of planar microcavity is demonstrated in log-pile 3D photon...
متن کاملFabrication of micro-axicons using direct-laser writing.
A novel direct-laser writing fabrication process for micro-axicons is demonstrated. A fiber-axicon-generated Bessel beam was utilized to write on UV-curable optical epoxy to form new axicons and axicon arrays, and geometrical parameters of the replicated epoxy axicons were analyzed in terms of both apex angle and proximity of the writing axicons. The shape of the fabricated axicons was demonstr...
متن کاملDesign, Fabrication and Measurement of Concave Micro Grating Spectrometer Chip Fabricated by X-ray Lithographic Technology
1 Graduate School of Electro-Optical Engineering, Yuan Ze University, Chung-Li, Tao-Yuan 320, Taiwan, R.O.C. 2 National Synchrotron Radiation Research Center, Hsinchu, Taiwan, R.O.C. 3 Department of Electro-Optical Engineering, Vanung University, Chung-Li , Tao-Yuan 32045, Taiwan, R.O.C. a [email protected]; b [email protected]; c [email protected]; d [email protected]; e row...
متن کاملFabrication and characterization of linear diffusers based on concave micro lens arrays.
We present a new approach of beam homogenizing elements based on a statistical array of concave cylindrical microlens arrays. Those elements are used to diffuse light in only one direction and can be employed together with fly's eye condensers to generate a uniform flat top line for high power coherent light sources. Conception, fabrication and characterization for such 1D diffusers are present...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: AIP Advances
سال: 2012
ISSN: 2158-3226
DOI: 10.1063/1.3679721